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          歡迎走進蓋斯帕克氣體技術!
          中文  |  English
          項目描述

            

           特氣系統設備為潔凈室里所有工藝設備提供所需的工藝氣體,是混合集成平臺必不可缺的基本設備,屬于混合集成平臺的核心裝備,將支撐微電子學院科研和教學。本設備的建設對于電子科學與技術和光學工程學科建設有重要的意義,年使用機時不少于3000 小時。


            該項目氣體種類共計25種,含17種毒腐/易燃爆/極危險特種氣體和8種普通高純氣體。配置全自動特氣柜GC、全自動氣瓶架GR、特種氣體VMB、特種氣體VMP、管道輸送系統(包括雙套管管道輸送系統)、二次配、廢氣廢液處理設備Scrubber、生命安全系統GMS、通風及廢氣處理。





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