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          歡迎走進蓋斯帕克氣體技術!
          中文  |  English
          產品名稱:
          閥門分配箱
          產品型號:
          HSPVMB130602
          產品特點:
          ...
          400-900-9093
          sales@szgp.com.cn
          深圳寶安松白路 創維數字大廈12樓
          產品描述:

          名稱:閥門分配箱(Valves Manifold Box)

          規格:一進多出

          型號:HSPVMB130602 

          ■ 特氣柜尺寸:W550寬×D500深×H600高 

          ■ VENT排空管:1/2MVCR接口 

          ■ 工藝氣體:1進N出(N=2~9) 

          ■ 盤面規格:1/4"盤面

          ■ 標準配備:防爆防腐柜體,防爆自鎖門,防爆玻璃觀察窗,泄漏報警,主材SS316L

          ■ 箱體換氣量:4"排氣口,SiH4-1200次/小時,其余300次/小時 

          ■ 選配:外吹掃,抽真空,全自動控制,工藝氣體超壓報警,遠程切斷,盤面加熱及溫控裝置,泄漏報警,報警信號手機短信與電話通知 

          ■ 適用范圍:應用在 MOCVD、PECVD、刻蝕機等配套設備上,適用于高校實驗室、材料分析實驗室、芯片半導體、光伏太陽能電池、生物醫藥工程、微電子新材料等行業。

          vmb閥門分配箱

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