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          歡迎走進蓋斯帕克氣體技術!
          中文  |  English
          產品名稱:
          雙瓶全自動特氣柜
          產品型號:
          HSPGC150206
          產品特點:
          ...
          400-900-9093
          sales@szgp.com.cn
          深圳寶安松白路 創維數字大廈12樓
          產品描述:

          雙瓶特氣柜(Gas Cabinet)

          名稱:雙瓶特氣柜

          規格:雙工藝氣瓶,全自動

          型號:HSPGC150206 

          ■ 特氣柜尺寸:W850寬×D500深×H1800高 

          ■ 外吹掃:PN2,1/4"MVCR接口 

          ■ 抽真空:GN2,1/4"MVCR接口 

          ■ 氣動隔膜閥:CDA驅動,1/4"卡套接口 

          ■ VENT排空管:1/2MVCR接口 

          ■ 工藝氣體出口:2個,1/4"MVCR接口 

          ■ 盤面規格:1/4"盤面

          ■ 標準配備:自動切換,防爆防腐柜體,防爆自鎖門,防爆玻璃觀察窗,泄漏報警,遠程切斷,欠壓報警,主材SS316L

          ■ 柜體換氣量:OD100mm排氣口,SiH4-1200次/小時,其余300次/小時 

          ■ 控制柜尺寸:W850寬×D230深×H320高 

          ■ 控制柜電源:220VAC,50HZ,200W,漏電保護

          ■ 操作界面:7"彩色觸摸屏

          ■ 選配:工藝氣瓶重量監控器,工藝氣體超壓報警,盤面加熱及溫控裝置,報警信號手機短信與電話通知 

          適用范圍:應用在 MOCVD、PECVD、刻蝕機等配套設備上,體現于芯片半導體、光伏太陽能電池、生物醫藥工程、微電子新材料等行業。


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